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three-dimensional surface structure analyzing microscope using scanning white-light interferometry  (ZYGO Corp)

 
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    ZYGO Corp three-dimensional surface structure analyzing microscope using scanning white-light interferometry
    Three Dimensional Surface Structure Analyzing Microscope Using Scanning White Light Interferometry, supplied by ZYGO Corp, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/three-dimensional+surface+structure+analyzing+microscope+using+scanning+white-light+interferometry/three+dimensional+surface+structure+analyzing+microscope/us09862863-155-21-28
    Average 90 stars, based on 1 article reviews
    three-dimensional surface structure analyzing microscope using scanning white-light interferometry - by Bioz Stars, 2026-11
    90/100 stars

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    Microscopy:

    Article Title: Polishing composition and method for polishing magnetic disk substrate
    Article Snippet: .. In a case where evaluation was “× (not allowable)”, a pit could be observed visually. (3-3) Surface Roughness (Zygo-Ra) Surface roughness (Ra) of an aluminum disk was measured using a three-dimensional surface structure analysis microscope using a scanning white-light interferometry manufactured by Zygo Corp. (hereinafter, surface roughness measured by this method is referred to as “Zygo-Ra”). .. As measurement conditions, a measurement device manufactured by Zygo Corp. (New View 5032 (lens: 2.5 times, zoom: 0.5 times)) and an analysis software (Metro Pro) manufactured by Zygo Corp. were used, a filter FFT Fixed Pass was used, a wavelength was set to 0.00 to 0.08 mm, and a measurement area was set to 5.68 mm×4.26 mm “Unmeasurable in surface roughness” indicates that a pit is observed and surface roughness cannot be measured by the above measurement method. (3-4) Roll-Off Ratio As evaluation of an end face shape, roll-off with a numerical value of the degree of edge rounding was measured.

    Article Title: Polishing composition and method for polishing magnetic disk substrate
    Article Snippet: .. Note that a polishing rate in Comparative Example 3 was 0.111 μm/min, and a polishing rate in Comparative Example 21 was 0.325 μm/min (3-2) Pit A pit was measured using a three-dimensional surface structure analyzing microscope using a scanning white-light interferometry manufactured by Zygo Corp. A pit was measured using a measurement device (New View 5032 (lens: 2.5 times, zoom: 0.5 times)) manufactured by Zygo Corp. and an analysis software (Metro Pro) manufactured by Zygo Corp. ..

    Article Title: Polishing composition for magnetic disk substrate
    Article Snippet: .. Waviness (Zygo-Sa) The waviness (Sa) of an aluminum disk was measured under a three-dimensional surface structure analyzing microscope utilizing a scanning white interference method, manufactured by Zygo Corp. (hereinafter, the waviness measured by this method is referred to as a “Zygo-Sa”). .. The measurement was made under the conditions of a measurement apparatus manufactured by Zygo Corp. (New View 8300 (lens: 1.4 times, zoom: 1.0 times) with a wavelength 100 to 500 μm and a measurement area of 6 mm×6 mm, and the analysis was performed using an analysis software (Mx), manufactured by Zygo Corp. (Method for Evaluating Washability of Polishing Agent) The polished aluminum disk in each of the Examples and Comparative Examples was rinsed with ion exchange water, buff washed using ion exchange water, further rinsed with ion exchange water after buff washing, and then dried by spin drying.

    Article Title: Polishing composition for magnetic disk substrate
    Article Snippet: .. In the case where the evaluation was “x (not allowable)”, a pit could be observed visually. (6) Waviness (Zygo-Sa) Waviness (Sa) of an aluminum disk was measured using a three-dimensional surface structure analysis microscope utilizing a scanning white interference method, manufactured by Zygo Corp. (hereinafter, waviness measured by this method is referred to as “Zygo-Sa”). .. As measurement conditions, a measurement apparatus manufactured by Zygo Corp. (New View 8300 (lens: 1.4 times, zoom: 1.0 time), a wavelength of 100 to 500 μm, and a measurement area of 6 mm×6 mm were used, and analysis was performed using an analysis software (Mx) manufactured by Zygo Corp. “Unmeasurable in waviness” indicates that a pit is observed and waviness cannot be measured by the above measurement method.

    Article Title: Polishing composition and method for polishing magnetic disk substrate
    Article Snippet: .. The polishing rate for Comparative Example 3 was 0.111 μm/min, and for Comparative Example 21 was 0.325 μm/min. (3-2) Pits Pits were measured under a three-dimensional surface structure analyzing microscope using scanning white-light interferometry, manufactured by Zygo Corp. .. The measurement was made using a measurement apparatus, manufactured by Zygo Corp. (e.g., New View 5032 with a lens of an ×2.5 magnification and a zoom of 0.5 times) and a analysis software, manufactured by Zygo Corp. (Metro Pro).

    Article Title: Polishing composition for magnetic disk substrate
    Article Snippet: .. Note that the polishing rate in Comparative Example 1 was 0.170 μm/min (5) Pit Pits were measured using a three-dimensional surface structure analyzing microscope utilizing a scanning white interference method, manufactured by Zygo Corp. Pits were measured using a measurement apparatus, manufactured by Zygo Corp. (New View 8300 (lens: 1.4 times, zoom: 1.0 time) and an analysis software (Mx), manufactured by Zygo Corp. ..

    Article Title: Polishing composition and method for polishing magnetic disk substrate
    Article Snippet: The polishing rate ratio is a relative value when the polishing rate for Comparative Example 1 which was determined using the above formula is 1. .. The polishing rate for Comparative Example 1 was 0.131 μm/min. (3-2) Pits Pits were measured under a three-dimensional surface structure analyzing microscope using scanning white-light interferometry, manufactured by Zygo Corp. .. The measurement was made using a measurement apparatus manufactured by Zygo Corp. (e.g., New View 5032 with a lens of an ×2.5 magnification and a zoom of 0.5 times) and a analysis software, manufactured by Zygo Corp. (Metro Pro).

    Article Title: Polishing composition for magnetic disk substrate
    Article Snippet: .. In Table 3, the polishing rate of Comparative Example 4 is set to 1, and the relative values thereto are shown for other experimental examples. (Pits) Pits were measured under a three-dimensional surface structure analyzing microscope utilizing a scanning white interference method, manufactured by Zygo Corp. .. The measurement was made using a measurement apparatus manufactured by Zygo Corp. (New View 8300 with a lens of an ×1.4 magnification and a zoom of 1.0 times) and a analysis software, manufactured by Zygo Corp. (Mx).

    Software:

    Article Title: Polishing composition and method for polishing magnetic disk substrate
    Article Snippet: .. Note that a polishing rate in Comparative Example 3 was 0.111 μm/min, and a polishing rate in Comparative Example 21 was 0.325 μm/min (3-2) Pit A pit was measured using a three-dimensional surface structure analyzing microscope using a scanning white-light interferometry manufactured by Zygo Corp. A pit was measured using a measurement device (New View 5032 (lens: 2.5 times, zoom: 0.5 times)) manufactured by Zygo Corp. and an analysis software (Metro Pro) manufactured by Zygo Corp. ..

    Article Title: Polishing composition for magnetic disk substrate
    Article Snippet: .. Note that the polishing rate in Comparative Example 1 was 0.170 μm/min (5) Pit Pits were measured using a three-dimensional surface structure analyzing microscope utilizing a scanning white interference method, manufactured by Zygo Corp. Pits were measured using a measurement apparatus, manufactured by Zygo Corp. (New View 8300 (lens: 1.4 times, zoom: 1.0 time) and an analysis software (Mx), manufactured by Zygo Corp. ..



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