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multi-die automatic thresholding (mdat) algorithm  (KLA Tencor)

 
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    KLA Tencor multi-die automatic thresholding (mdat) algorithm
    Multi Die Automatic Thresholding (Mdat) Algorithm, supplied by KLA Tencor, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/histogram+based+multi-thresholding+module/segmented+auto+thresholding++sat+/us10395358-648-19-38
    Average 90 stars, based on 1 article reviews
    multi-die automatic thresholding (mdat) algorithm - by Bioz Stars, 2026-11
    90/100 stars

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    Article Title: Systems and methods for detecting defects on a wafer
    Article Snippet: Examples of suitable defect detection algorithms, which can be applied to the additional image data, include segmented auto-thresholding (SAT) or multiple die auto-thresholding (MDAT), which are used by commercially available inspection systems such as those from KLA-Tencor.

    Article Title: Selecting parameters for defect detection methods
    Article Snippet: Automatic segmented auto thresholding (AutoSAT), which is commercially available from KLA-Tencor, can optimize SAT inspection recipes automatically.

    Article Title: Detecting die repeating programmed defects located in backgrounds with non-repeating features
    Article Snippet: Examples of suitable defect detection algorithms, which can be applied to the additional image data, include segmented auto-thresholding (SAT) and multiple die auto-thresholding (MDAT), which are used by commercially available inspection systems such as those from KLA-Tencor.

    Article Title: Computer-implemented methods, carrier media, and systems for creating a defect sample for use in selecting one or more parameters of an inspection recipe
    Article Snippet: In the case of bright field (BF) inspection systems commercially available from KLA-Tencor, San Jose, Calif., the detection algorithms may be either auto-thresholding (AT), segmented auto-thresholding (SAT) or multiple die auto-thresholding (MDAT), and the inspection parameters are segment breaks and thresholds.

    Article Title: Single image detection
    Article Snippet: This is the principle method behind some detection methods implemented on inspection tools commercially available from KLA-Tencor, Milpitas, Calif., such as segmented auto-thresholding (SAT), median die auto-thresholding (MDAT), HLAT, context-based inspection (CBI), and target based inspection (TBI).

    Article Title: Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
    Article Snippet: In the case of bright field (BF) inspection systems commercially available from KLA-Tencor, San Jose, Calif., the detection algorithms may be auto-thresholding (AT), segmented auto-thresholding (SAT) or multiple die auto-thresholding (MDAT), and the inspection parameters may be segment breaks and thresholds.

    Article Title: High sensitivity repeater defect detection
    Article Snippet: The local multi die adaptive threshold algorithm may include any suitable such algorithm known in the art including the multi-die automatic thresholding (MDAT) algorithm and the nanoMDAT algorithm that are available on some inspection systems commercially available from KLA-Tencor.



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