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reticle design file (rdf)  (KLA Tencor)

 
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    KLA Tencor reticle design file (rdf)
    Reticle Design File (Rdf), supplied by KLA Tencor, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
    https://www.bioz.com/product/data+files/reticle+design+file++kw++data/us10620134-91-10-3
    Average 90 stars, based on 1 article reviews
    reticle design file (rdf) - by Bioz Stars, 2026-11
    90/100 stars

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    Related Articles

    other:

    Article Title: Creating defect samples for array regions
    Article Snippet: Other examples of such files include GLI and OASIS files and proprietary file formats such as reticle design file (KW) data, which is proprietary to KLA-Tencor, Milpitas, Calif.

    Article Title: Creating defect samples for array regions
    Article Snippet: As mentioned above, KLA-Tencor has a proprietary format called a reticle design file (RDF) representing chip design data.



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