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Experimental results of the sensor. (a) SEM image of fabricated slot antennas and scattering grating. Inset: Magnified SEM image of the antenna pair. (b) Schematic of the experimental setup. (c) CCD image of the antenna pair and diffraction grating under the illumination of an x -polarized <t>supercontinuum</t> light laser. (d) Output spectra (dots) and the corresponding polynomial fittings (lines) for different x 0 values. (e) Extinction wavelength versus the displacement. The line presents the linear fitting. Inset: Extinction wavelength and measurement uncertainty versus the displacement.
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Experimental results of the sensor. (a) SEM image of fabricated slot antennas and scattering grating. Inset: Magnified SEM image of the antenna pair. (b) Schematic of the experimental setup. (c) CCD image of the antenna pair and diffraction grating under the illumination of an x -polarized <t>supercontinuum</t> light laser. (d) Output spectra (dots) and the corresponding polynomial fittings (lines) for different x 0 values. (e) Extinction wavelength versus the displacement. The line presents the linear fitting. Inset: Extinction wavelength and measurement uncertainty versus the displacement.
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Experimental results of the sensor. (a) SEM image of fabricated slot antennas and scattering grating. Inset: Magnified SEM image of the antenna pair. (b) Schematic of the experimental setup. (c) CCD image of the antenna pair and diffraction grating under the illumination of an x -polarized supercontinuum light laser. (d) Output spectra (dots) and the corresponding polynomial fittings (lines) for different x 0 values. (e) Extinction wavelength versus the displacement. The line presents the linear fitting. Inset: Extinction wavelength and measurement uncertainty versus the displacement.

Journal: Nanophotonics

Article Title: An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation

doi: 10.1515/nanoph-2021-0754

Figure Lengend Snippet: Experimental results of the sensor. (a) SEM image of fabricated slot antennas and scattering grating. Inset: Magnified SEM image of the antenna pair. (b) Schematic of the experimental setup. (c) CCD image of the antenna pair and diffraction grating under the illumination of an x -polarized supercontinuum light laser. (d) Output spectra (dots) and the corresponding polynomial fittings (lines) for different x 0 values. (e) Extinction wavelength versus the displacement. The line presents the linear fitting. Inset: Extinction wavelength and measurement uncertainty versus the displacement.

Article Snippet: An x -polarized supercontinuum laser beam (SC-5, YSL Photonics, China) was focused using an oil-immersion objective (100×, NA = 1.4) and normally illuminated upon the antenna pair from the silica substrate along the + z -axis.

Techniques:

Experimental results of the sensor with a dispersive interference fringe light source. (a) Schematic of the experimental setup. (b) CCD image of the interference fringe when a narrowband filter of 810 nm is used. (c) SEM image of fabricated antenna pairs and the scattering grating. Inset: Magnified SEM image of antenna pairs. (d) CCD image of antenna pairs and diffraction grating under the illumination of an x -polarized supercontinuum laser beam. (e) Output spectra for different displacements Δ x . (f) Extinction wavelength versus the displacement Δ x . Red lines represent linear fittings.

Journal: Nanophotonics

Article Title: An ultra-compact angstrom-scale displacement sensor with large measurement range based on wavelength modulation

doi: 10.1515/nanoph-2021-0754

Figure Lengend Snippet: Experimental results of the sensor with a dispersive interference fringe light source. (a) Schematic of the experimental setup. (b) CCD image of the interference fringe when a narrowband filter of 810 nm is used. (c) SEM image of fabricated antenna pairs and the scattering grating. Inset: Magnified SEM image of antenna pairs. (d) CCD image of antenna pairs and diffraction grating under the illumination of an x -polarized supercontinuum laser beam. (e) Output spectra for different displacements Δ x . (f) Extinction wavelength versus the displacement Δ x . Red lines represent linear fittings.

Article Snippet: An x -polarized supercontinuum laser beam (SC-5, YSL Photonics, China) was focused using an oil-immersion objective (100×, NA = 1.4) and normally illuminated upon the antenna pair from the silica substrate along the + z -axis.

Techniques: