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a , b A-posteriori 2D COMSOL® simulations of the devices shown in Fig. and agreement with the experimental data in predicting \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${k}_{t}^{2}$$\end{document} k t 2 a and f s b . The error bars show the maximum and minimum measured value per data point. In c , COMSOL® simulations of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${k}_{t}^{2}$$\end{document} k t 2 as function of Sc-doping of the piezoelectric film for different metal electrodes are provided. The simulated device has an h / λ ratio of 0.4. The IDT thicknesses are 95, 30, 40, and 70 nm for Al, Pt, W, and Mo, respectively. This optimal values were found via COMSOL® FEM.

Journal: Nature Communications

Article Title: Compact and wideband nanoacoustic pass-band filters for future 5G and 6G cellular radios

doi: 10.1038/s41467-023-44038-9

Figure Lengend Snippet: a , b A-posteriori 2D COMSOL® simulations of the devices shown in Fig. and agreement with the experimental data in predicting \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${k}_{t}^{2}$$\end{document} k t 2 a and f s b . The error bars show the maximum and minimum measured value per data point. In c , COMSOL® simulations of \documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${k}_{t}^{2}$$\end{document} k t 2 as function of Sc-doping of the piezoelectric film for different metal electrodes are provided. The simulated device has an h / λ ratio of 0.4. The IDT thicknesses are 95, 30, 40, and 70 nm for Al, Pt, W, and Mo, respectively. This optimal values were found via COMSOL® FEM.

Article Snippet: The design optimization process was performed via 2D and 3D COMSOL® Finite Element Modeling (FEM) simulations, and is further discussed in the Methods section.

Techniques: